Surface gratings, photonics circuit, and method for wafer-level testing thereof

ABSTRACT

A surface grating coupler for polarization splitting or diverse includes a planar layer and an array of scattering elements arranged in the planar layer at intersections of a first set of concentric elliptical curves crossing with a second set of concentric elliptical curves rotated proximately 90 or 180 degrees to form a two-dimensional (2D) grating. Additionally, the grating coupler includes a first waveguide in double-taper shape and a second waveguide in double-taper shape respectively for split or diverse an incident light into the 2D grating into two output light to two output ports with a same (either TE or TM) polarization mode or one output port with TE polarization mode and another output port with TM polarization mode. The polarization diverse grating coupler is required to test multiple polarization sensitive photonics components and can be used with other single polarization grating coupler via a fiber array to perform wafer-level testing.

CROSS-REFERENCE TO RELATED APPLICATIONS

N/A

BACKGROUND OF THE INVENTION

The present invention relates to optical communication techniques. Moreparticularly, the present invention provides a surface gratings devicefor optical input/output, a wafer level integrated circuit for aphotonics optical system, and method of using thereof.

Over the last few decades, the use of communication networks exploded.In the early days Internet, popular applications were limited to emails,bulletin board, and mostly informational and text-based web pagesurfing, and the amount of data transferred was usually relativelysmall. Today, Internet and mobile applications demand a huge amount ofbandwidth for transferring photo, video, music, and other multimediafiles. For example, a social network like Facebook processes more than500 TB of data daily. With such high demands on data and data transfer,existing data communication systems need to be improved to address theseneeds.

Progress in computer technology (and the continuation of Moore's Law) isbecoming increasingly dependent on faster data transfer between andwithin microchips. Optical interconnects may provide a way forward, andsilicon photonics may prove particularly useful, once integrated on thestandard silicon chips. Surface gratings are important form of opticalinput/output (IO) since they allow us to do wafer level testing which isessential for product line of making photonics systems on chips. Forexample, surface grating can be put in form of the array ofinput/outputs using the fiber array as an optical probe, multipleoutputs can be measured simultaneously with only one alignment. Otherforms of IO such as edge coupling, requires dicing before testing. Also,it is more time consuming as each die and component should be testedseparately with a single fiber. Separate alignment is also necessary foreach input and output. Additionally, surface grating can be utilized fora single polarization or as a polarization diverse component. The latercan be used for measurement of the polarization sensitive componentswhere both sources of TE and TM are launched to the wafer.

Most conventional polarization splitting gratings are able to providepolarization light in either TE or TM polarization mode to the wafer butwith poor coupling efficiency. The conventional grating coupler forpolarization diverse that provides both TE and TM polarization light arelarge in size as they cannot use focusing configuration. Therefore, animproved surface grating device with either polarization splitting ordiverse function is desired to be integrated in a photonics system.

BRIEF SUMMARY OF THE INVENTION

The present invention relates to optical telecommunication techniques.More particularly, the present invention provides a surface grating foroptical IO with polarization slitting or diverse function for performingwafer-level testing of an array of photonics chip components on a chipfor high data rate optical communications, though other applications arepossible.

In modern electrical interconnect systems, high-speed serial links havereplaced parallel data buses, and serial link speed is rapidlyincreasing due to the evolution of CMOS technology. Internet bandwidthdoubles almost every two years following Moore's Law. But Moore's Law iscoming to an end in the next decade. Standard CMOS silicon transistorswill stop scaling around 5 nm. And the internet bandwidth increasing dueto process scaling will plateau. But Internet and mobile applicationscontinuously demand a huge amount of bandwidth for transferring photo,video, music, and other multimedia files. This disclosure describestechniques and methods to improve the communication bandwidth beyondMoore's law.

In an embodiment, the present invention provides a surface gratingcoupler for polarization splitting. The surface grating coupler includesa planar layer. Additionally, the surface grating coupler includes anarray of scattering elements arranged in a portion of the planar layerat a plurality of intersections of a first set of concentric ellipticalcurves crossing with a second set of concentric elliptical curvesrotated proximately 90 degrees to form a two-dimensional (2D) grating.The surface grating coupler further includes a first extra gratingformed in the planar layer outside a first concave side of the 2Dgrating and a second extra grating formed in the planar layer outside asecond concave side of the 2D grating. Furthermore, the surface gratingcoupler includes a first waveguide formed in the same planar layerconnecting a first convex side of the 2D grating to a first output port,the first convex side being opposite to the first concave side.Moreover, the surface grating coupler includes a second waveguide formedin the same planar layer connecting a second convex side of the 2Dgrating to a second output port. The second convex side is opposite tothe second concave side. Optionally, each of the first waveguide and thesecond waveguide is characterized by a double-taper shape.

In an alternative embodiment, the present invention provides a surfacegrating coupler for polarization diverse. The surface grating couplerincludes a planar layer. Additionally, the surface grating couplerincludes an array of scattering elements arranged in a portion of theplanar layer at a plurality of intersections of a first set ofconcentric elliptical curves crossing with a second set of concentricelliptical curves rotated proximately 180 degrees to form atwo-dimensional (2D) grating. The surface grating coupler furtherincludes a first waveguide coupled from the first convex side of the 2Dgrating to a first output port. Furthermore, the surface grating couplerincludes a second waveguide coupled from the second convex side of the2D grating to a second output port, the second output port beingorientated proximately 180 degrees relative to the first output port.Each of the first waveguide and the second waveguide is characterized bya double-taper shape.

In yet another embodiment, the present invention provides a method forperforming wafer-level optical verification. The method includesproviding an array of photonics chip devices on a substrate.Additionally, the method includes forming an array of surface gratingcouplers on the substrate. Each surface grating coupler includes anarray of scattering elements arranged in a portion of the substrate at aplurality of intersections of a first set of concentric ellipticalcurves crossing with a second set of concentric elliptical curvesrotated proximately 90 or 180 degrees to form a two-dimensional (2D)grating. Each surface grating coupler further includes a first waveguidecoupled from the first convex side of the 2D grating to a first outputport and a second waveguide coupled from the second convex side of the2D grating to a second output port, the second output port beingorientated proximately 90 or 180 degrees relative to the first outputport. The method further includes coupling the first output port and thesecond output port respectively to one or more of input waveguides oroutput waveguides of at least one of the array of photonics chipdevices. Furthermore, the method includes providing an array of opticalfibers on top of the substrate with corresponding fiber outputs orinputs commonly aligned with an angle deviate slightly from 90 degreesrelative to the substrate for respectively providing or receivingpolarized light in either TE polarization mode or TM polarization mode.Moreover, the method includes performing measurement of at least some ofthe array of photonics chip devices or some outputs of at least one ofthe array of photonics chip devices simultaneously.

In an alternative embodiment, the present invention provides awafer-level testing system. The system includes an array of devicesunder test (DUTs) formed in a substrate and an array of surface gratingcouplers formed in the same substrate. The array of surface gratingcouplers includes at least a polarization splitting grating couplercontaining an array of scattering elements arranged in a portion of thesubstrate at a plurality of intersections of a first set of concentricelliptical curves crossing with a second set of concentric ellipticalcurves rotated proximately 90 degrees as a two-dimensional (2D) gratingwith the first waveguide and the second waveguide formed in the samesubstrate. The polarization splitting grating coupler is configured toreceive an incident light from atop of the substrate via an opticalfiber and to split the incident light to a first polarization light inTE (or TM) mode to the first waveguide coupled to a first output portand a second polarization light in TE (or TM) mode to the secondwaveguide coupled to a second output port. The system further optionallyincludes a polarization diverse grating coupler containing an array ofscattering elements arranged in a portion of the substrate at aplurality of intersections of a first set of concentric ellipticalcurves crossing with a second set of concentric elliptical curvesrotated proximately 180 degrees as a two-dimensional (2D) grating withthe first waveguide and the second waveguide formed in the substrate.The polarization diverse grating coupler is configured to receive anincident light from atop of the substrate via an optical fiber and todiverse a first polarization light in TM (or TE) mode to the firstwaveguide coupled to a first output port and a second polarization lightin TE (or TM) mode to the second waveguide coupled to a second outputport. Optionally, the polarization diverse grating coupler is used toprovide polarization optical inputs in both TM or TE mode and thepolarization splitting grating coupler is used either for providingoptical inputs with single polarization or detect optical outputs of theDUTs formed in the same substrate in a wafer-level testing scheme.

The present invention achieves these benefits and others in the contextof known waveguide laser communication technology. However, a furtherunderstanding of the nature and advantages of the present invention maybe realized by reference to the latter portions of the specification andattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The following diagrams are merely examples, which should not undulylimit the scope of the claims herein. One of ordinary skill in the artwould recognize many other variations, modifications, and alternatives.It is also understood that the examples and embodiments described hereinare for illustrative purposes only and that various modifications orchanges in light thereof will be suggested to persons skilled in the artand are to be included within the spirit and purview of this process andscope of the appended claims.

FIG. 1 is a schematic diagram of a surface grating coupler forpolarization splitting according to some embodiments of the presentdisclosure.

FIG. 2 is a schematic diagram of the surface grating coupler forsplitting an incident light received from atop to a parallelpolarization component in a first output port and an orthogonalpolarization component in a second output port according to anembodiment of the present disclosure.

FIG. 3 is a schematic diagram of a surface grating coupler forpolarization diverse according to some embodiments of the presentdisclosure.

FIG. 4 is a schematic diagram showing an incident beam deviated slightlyfrom 90 degrees relative to a grating plane of the surface gratingcoupler of FIG. 3 to diverse a polarization light in TM (or TE) mode toa first output port and a polarization light in TE (or TM) mode to asecond output port in opposite direction according to an embodiment ofthe present disclosure.

FIG. 5 is a plane view of a surface grating coupler of FIG. 3 forperforming wafer-level testing of two polarization DeMux devices formedin the same substrate according to an embodiment of the presentdisclosure.

FIG. 6 is a plane view of a layout of using the surface grating couplerof FIG. 1 to provide optical performance verification of a Mach-Zehndermodulator according to an embodiment of the present disclosure.

FIG. 7A and FIG. 7B are exemplary plane views of an array of photonicschip components under a wafer-level testing using an array of surfacegrating couplers formed in the same substrate according to someembodiments of the present disclosure.

FIG. 8 is a plane view of a surface grating coupler of FIG. 3 forproviding optical inputs and several surface grating couplers of FIG. 1for detecting optical outputs to test two polarization DeMux devicesformed in the same substrate according to an embodiment of the presentdisclosure.

FIG. 9 is a plane view of a layout of wafer-level testing of an array ofintegrated silicon-photonics modules using the surface grating couplersof FIG. 1 and monitor PDs according to some embodiments of the presentdisclosure.

FIG. 10A is an exemplary testing layout of using a grating couplerreceiving variable optical signals from a tunable laser for testing anoptical hybrid phase modulator with multiple photodiodes according to anembodiment of the present disclosure.

FIG. 10B is an exemplary testing layout of using a grating couplerreceiving variable optical signals from a tunable laser for testing awavelength Mux/DeMux device with multiple photodiodes according to anembodiment of the present disclosure.

DETAILED DESCRIPTION OF THE INVENTION

The present invention relates to optical telecommunication techniques.More particularly, the present invention provides a surface grating foroptical IO with polarization splitting or diverse function forperforming wafer-level testing of an array of photonics chip componentson chip for high data rate optical communications, though otherapplications are possible.

The following description is presented to enable one of ordinary skillin the art to make and use the invention and to incorporate it in thecontext of particular applications. Various modifications, as well as avariety of uses in different applications will be readily apparent tothose skilled in the art, and the general principles defined herein maybe applied to a wide range of embodiments. Thus, the present inventionis not intended to be limited to the embodiments presented, but is to beaccorded the widest scope consistent with the principles and novelfeatures disclosed herein.

In the following detailed description, numerous specific details are setforth in order to provide a more thorough understanding of the presentinvention. However, it will be apparent to one skilled in the art thatthe present invention may be practiced without necessarily being limitedto these specific details. In other instances, well-known structures anddevices are shown in block diagram form, rather than in detail, in orderto avoid obscuring the present invention.

The reader's attention is directed to all papers and documents which arefiled concurrently with this specification and which are open to publicinspection with this specification, and the contents of all such papersand documents are incorporated herein by reference. All the featuresdisclosed in this specification, (including any accompanying claims,abstract, and drawings) may be replaced by alternative features servingthe same, equivalent or similar purpose, unless expressly statedotherwise. Thus, unless expressly stated otherwise, each featuredisclosed is one example only of a generic series of equivalent orsimilar features.

Furthermore, any element in a claim that does not explicitly state“means for” performing a specified function, or “step for” performing aspecific function, is not to be interpreted as a “means” or “step”clause as specified in 35 U.S.C. Section 112, Paragraph 6. Inparticular, the use of “step of” or “act of” in the Claims herein is notintended to invoke the provisions of 35 U.S.C. 112, Paragraph 6.

Please note, if used, the labels left, right, front, back, top, bottom,forward, reverse, entry, exit, clockwise and counter clockwise have beenused for convenience purposes only and are not intended to imply anyparticular fixed direction. Instead, they are used to reflect relativelocations and/or directions between various portions of an object.

In general, surface grating provides an important form of opticalinput/output (IO) for it allows a wafer level testing to be possiblewhich is essential for product line manufacture of photonics chipcomponents, module, subsystem, or system-on-chip. For example, surfacegrating can be put in form of the array of IOs where array of opticalfibers are used as optical probe to provide incident light to thedevices under test (DUTs). Multiple outputs can be measuredsimultaneously with only one optical alignment done on the array ofoptical fibers.

Other forms of optical IO such as edge coupling require wafer dicing toget individual device in each die before testing. It is more timeconsuming as each die and component should be tested separately with asingle optical fiber. Separate alignment is necessary for each input andoutput.

Accordingly, the present disclosure provides, inter alia, a surfacegrating coupler with enhanced performance in polarization splittinggrating provided TE or TM polarization to the wafer devices and asurface grating coupler providing both TE and TM polarization withfocusing configuration, and array of surface grating couplers describedherein integrated on photonics chip, e.g., silicon-photonics (SiPho)chip, and a method of performing wafer-level testing on the integratedSiPho chip that substantially obviate one or more of the problems due tolimitations and disadvantages of the related art.

In one aspect, the present disclosure provides a surface grating couplerfor polarization splitting. FIG. 1 is a schematic diagram of a surfacegrating coupler for polarization splitting according to some embodimentsof the present disclosure. This diagram is merely an example, whichshould not unduly limit the scope of the claims. One of ordinary skillin the art would recognize many variations, alternatives, andmodifications. Referring to FIG. 1, the surface grating coupler 10includes a planar layer. Optionally, the planar layer may be a siliconlayer on a silicon-on-insulator (SOI) substrate. Or, it is simplyreferred to a planar layer on a substrate. FIG. 1 is merely a top planeview of the surface grating coupler. Additionally, the surface gratingcoupler includes an array of scattering elements 1000 arranged in theplanar layer periodically in multiple locations corresponding tointersections of a first set of concentric elliptical curves 110crossing a second set of concentric elliptical curves 120 which isrotated proximately 90 degrees relative to the first set of concentricelliptical curves 110. Referring to an expanded view of an region of thetwo sets crossing elliptical curves, these elliptical curves are virtuallines without appearing in the planar layer. Optionally, each ellipticalcurve 110 or 120 is a section of vertical or close to vertical ellipse.Optionally, each of the first set of elliptical curves 110 and thesecond set of concentric elliptical curves 120 has an equal spacing pbetween any two adjacent elliptical curves. The spacing p provides aperiod for the array of scattering elements formed at the intersections,resulting in a grating period of a two-dimensional (2D) grating 100.

Referring to another expanded view in FIG. 1 of a row of scatteringelements, each scattering element 1000 can be a hole into the planarlayer or a pillar protruded above the planar layer. Optionally, eachscattering element 1000 can have an arbitrary shape such as cylinder,cube, a pyramid, a prism or a polyhedron with a variable nominal size w.Optionally, the scattering elements 1000 are arranged in atwo-dimensional array with to a variable spacing between any twoadjacent scattering elements to form the 2D grating 100 while keepingthe filling factor the same for different duty cycle across the grating.In a top view shown by FIG. 1, the 2D grating 100 occupies a portion ofthe planar layer with a first concave side 111, a second concave side121, a first convex side 112, and a second convex side 122.

Further, the surface grating coupler 10 includes a first extra grating114 formed in the same planar layer outside the first concave side 111of the 2D grating 100 and a second extra grating 124 formed in the sameplanar layer outside the second concave side 121 of the 2D grating 100.Optionally, the first extra grating 114 includes multiple trenchesformed in the planar layer in parallel to the first set of concentricelliptical curves 110. Each trench is configured to have a width and aspacing from its adjacent one of the multiple trenches. Each trench hasa curvature of a vertical or close to vertical ellipse substantially thesame as that of the first set of concentric elliptical curves 110.Similarly, the second extra grating 124 includes multiple trenchesformed in the planar layer in parallel to the second set of concentricelliptical curves 120. Each trench is configured to have a width and aspacing from its adjacent one of the multiple trenches. Each trench hasa curvature of a vertical or close to vertical ellipse substantially thesame as that of the first set of concentric elliptical curves 120.

Referring to FIG. 1 again, the surface grating coupler 10 furthermoreincludes a first waveguide 115 formed in the planar layer and coupledfrom the first convex side 112 to a first output port 116 and a secondwaveguide 125 formed in the same planar layer and coupled from thesecond convex side 122 to a second output port 126. In an embodiment,each of the first waveguide 115 and the second waveguide 125 isconfigured to be a double-taper shape.

FIG. 2 is a schematic diagram of the surface grating coupler forsplitting an incident light received from atop to a parallelpolarization component in a first output port and an orthogonalpolarization component in a second output port according to anembodiment of the present disclosure. This diagram is merely an example,which should not unduly limit the scope of the claims. One of ordinaryskill in the art would recognize many variations, alternatives, andmodifications. Referring to FIG. 2, the surface grating coupler 10 issubjected to receive an incident light, optionally provided via anoptical fiber, aligned in an incident angle θ relative to a normaldirection of the planar layer. Optionally, an optical fiber can bealigned with an angle deviated from the normal direction of a substrate.Therefore, the incident light is guided by the optical fiber in an angleslightly deviated from 90 degrees relative to the planar layer (i.e., aplane of substrate or a plane of grating). The deviation of the incidentangle from 90 degrees relative to the planar layer results in tiltedoptical phase front.

The incident light is then decomposed into two polarization components,one is a parallel polarization component E_(∥) and another one is anorthogonal polarization component E_(⊥). The surface grating coupler 10is configured to be a polarization splitting grating coupler forcoupling the parallel polarization component E_(∥) and the orthogonalpolarization component E_(⊥) respectively to the first output port 116and the second output port 126 provided that corresponding phasematching conditions are fulfilled.

In an embodiment, the incident light is scattered by the array ofscattering elements 1000 arranged with a grating period p of the 2Dgrating 100 formed in the intersections of the two sets of concentricelliptic curves 110 and 120 relatively rotated proximately 90 degrees.As the incident light is incident with an angle θ relative to normaldirection of a plane of the 2D grating 100 and diffracted by the arrayof scattering elements 1000, the parallel polarization component E_(∥)is primarily coupled towards the first convex side 112 of the 2D grating100 and the orthogonal polarization component E_(⊥) is primarily coupledtowards the second convex side 122 of the 2D grating 100. A portion ofincident light is scattered towards the first concave side 111 and thesecond concave side 121 of the 2D grating 100.

Referring to FIG. 2, the first extra grating 114 disposed outside thefirst concave side 111 includes several trenches, or in general 1Dgratings, with continuous curve length close to that of the firstconcave side 111 in a substantially same curvature of the first set ofconcentric elliptic curves 110. Each of the several 1D gratings has awidth w1 and a spacing s1 relative to its neighboring trench.Optionally, w1 or s1 is proximately the same as the grating period p ofthe 2D grating 100. Similarly, the second extra grating 124 disposedoutside includes several trenches the second concave side 121 withcontinuous curve length close to that of the second concave side 121 ina substantially same curvature of the second set of concentric ellipticcurves 120. Each of the several 1D gratings has a width w2 and a spacings2 relative to its neighboring trench. Optionally, w2 or s2 isproximately the same as the grating period p of the 2D grating 100. Eachof the first extra grating 114 and the second extra grating 124 isconfigured in a form of focusing grating to recollect light outgoingtowards both the first concave side 111 and the second concave side 121and feed the light back to the first convex side 112 and the secondconvex side respectively, enhancing the coupling efficiency of thesurface grating coupler 10.

In the embodiment, the surface grating coupler also includes the firstwaveguide 115 and the second waveguide 125 each configured as adouble-taper structure which is optimized to provide maximum couplingefficiency of transmitting the parallel polarization component E_(∥) tothe first output port 116 and transmitting the orthogonal polarizationcomponent E_(⊥) to the second output port 126. Referring to FIG. 2, thefirst waveguide 115 includes a first taper section 1151 with a reducingfirst width from the first convex side 112 to a first joint 1150 over afirst length L1 along a first nominal direction and a second tapersection 1152 with a reducing second width from the first joint 1150 tothe first output port 116 over a second length L2 along a second nominaldirection. Similarly, the second waveguide 125 includes a third tapersection 1251 with a reducing third width from the second convex side 122to a second joint 1250 over a third length L3 along a third nominaldirection and a fourth taper section 1252 with a reducing fourth widthfrom the second joint 1250 to the second output port 126 over a fourthlength L4 along a fourth nominal direction. In the embodiment, thenominal direction is substantially along a bisector line of thewaveguide. The first nominal direction is along a first bisector line ofthe first taper section 1151 and the second nominal direction is along asecond bisector line of the second taper section 1152. Optionally, anangle α1 between the second nominal direction and the first nominaldirection is close to but not limited to 180 degrees. Optionally, anangle α2 between the first output port 116 and the second nominaldirection is close to but not limited to 180 degrees. Optionally, anangle β1 between the fourth nominal direction and the third nominaldirection is close to but not limited to 180 degrees. Optionally, anangle β2 between the second output port 126 and the fourth nominaldirection is close to but not limited to 180 degrees. Optionally, anangle ϕ between the first output port 116 and the second output port 126is an arbitrary angle offset from 90 degrees depended on the incidentangle θ relative to normal of the plane of the 2D grating 100.

In the embodiment, all characterizing parameters of the double-taperstructure for either the first waveguide 115 or the second waveguide 125including lengths L1, L2, L3, and L4, first width, second width, thirdwidth, and fourth width, angles α1, α2, β1, and β2 can be selected tooptimize the transmission of a portion of incident light with a parallelpolarization to the first output port 116 with minimum insertion lossand another portion of incident light with an orthogonal polarization tothe second output port 126 with minimum insertion loss. In anembodiment, the light coupled into the first output port 116 issubstantially in transverse magnetic (TM) [or transverse electric (TE)]mode corresponding to the parallel polarization component E_(∥) and thelight coupled into the second output port 126 is also substantially inTM (or TE) mode corresponding to orthogonal polarization componentE_(⊥). The double-taper structure is configured to help guiding thelight to the output port with enhanced coupling efficiency even if theangle of propagation constant varies and the focal point of thescattered light varies due to various factors such as fabricationvariation, fiber optic position offset from optimum position, or others.In an embodiment, each of the first output port 116 and the secondoutput port 126 is configured to be located at the focal points ofcorresponding first set of concentric elliptical curves 110 and thesecond set of concentric elliptical curves 120.

In an alternative embodiment, the present disclosure provides apolarization diverse grating coupler configured to phase match theparallel polarization component of incident light to a transversemagnetic (TM) mode coupled into a first output waveguide and theorthogonal polarization component of incident light to a transverseelectric (TE) mode coupled into a second output waveguide. FIG. 3 isschematic diagram of a surface grating coupler for polarization diverseaccording to some embodiments of the present disclosure. This diagram ismerely an example, which should not unduly limit the scope of theclaims. One of ordinary skill in the art would recognize manyvariations, alternatives, and modifications. As shown, the surfacegranting coupler 30 includes a planar layer of silicon of a SOIsubstrate which may be the same substrate for forming an array ofphotonics chip components. The surface grating coupler 30 furtherincludes an array of scattering elements 3000 configured in a periodicorder to form a 2D grating 300. The scattering elements 3000 of the 2Dgrating are located at intersections of two sets of concentricelliptical curves rotated proximately 180 degrees with respect to eachother. A first set of concentric elliptical curves 310 has a first pitchp1. Each elliptical curve 310 is a section of vertical or close tovertical ellipse so that the first set of concentric elliptical curves310 forms a focus grating with a first grating period p1. A second setof concentric elliptical curves 320 has a second pitch p2. Eachelliptical curve 320 is a section of vertical or close to verticalellipse to form a focus grating with a second grating period p2.

Optionally, these elliptical curves can be virtual curves withoutactually appearing in the planar layer except that at the locations oftheir intersections holes or pillars of any shape are formed to beconfigured as the array of scattering elements 3000 configured as the 2Dgrating 300. As viewed from atop (FIG. 3), the 2D grating 300 has twomajor boundaries, i.e., a first convex side 311 and a second convex side321.

Additionally, the surface granting coupler 30 includes a first waveguide315 coupled from the first convex side 311 of the 2D grating 300 to afirst output waveguide 316 and a second waveguide 325 coupled from thesecond convex side 321 of the 2D grating 300 to a second outputwaveguide 326. The second output waveguide 326 is orientated proximately180 degrees with respect to the first output waveguide 316. Each of thefirst waveguide 315 and the second waveguide 325 is characterized by adouble-taper shaped structure. Optionally, the double-taper shapedstructure includes a first taper section 3151 (3251) with a reducingfirst width from the first (second) convex side 311 (321) to a first(second) joint 3150 (3250) over a first length along a first bisector31510 (32510) of the first taper section 3151 (3251) and a second tapersection 3152 (3252) with a reducing second width from the first (second)joint 3150 (3250) to the first (second) output waveguide 316 (326) overa second length along a second bisector 31520 (32520) of the secondtaper section 3152 (3252).

FIG. 4 is a schematic diagram showing that a light beam is guided fromatop of the planar layer with an angle θ deviated from 90 degrees, it isdecomposed as a parallel polarization component E_(∥) and an orthogonalpolarization component E_(⊥). As the light beam is incident to the 2Dgrating 300, it is diffracted by the array of scattering elements 3000located at the intersections of the first set of concentric ellipses 310and the second set of ellipses 320 rotated approximately 180 degreeswith respect to each other. The diffractions result in phase match ofthe parallel polarization component E_(∥) to a transverse magnetic (TM)mode in a first waveguide 315 and the orthogonal polarization componentE_(⊥) to a transverse electric (TE) mode in a second waveguide 325 insubstantially opposite direction (i.e., 180 degrees with respect to eachother). All structural parameters associated with the double-taper shapeof the first waveguide 315 and the second waveguide 325 can be optimizedin terms of achieving a minimum insertion loss of transmitting aparallel polarization component E_(∥) and an orthogonal polarizationcomponent E_(⊥) of the incident light with an incident angle deviatedfrom normal of the planar layer respectively to the first outputwaveguide 316 and the second output waveguide 326.

In the embodiment, the grating period of the 2D grating 300 can beoptimized independently for the best phase matching in each of the twooutput waveguides respectively for TE mode and TM mode. Optionally, thefirst set of concentric elliptical curves 310 is optimized with itsfirst pitch p1 equal to a grating period Λ_(TM) for maximizing couplingefficiency to incorporate the parallel polarization component E_(∥) intothe first waveguide 315 substantially in TM mode and the second set ofconcentric elliptical curves 320 is optimized with its second pitch p2equal to a grating period Λ_(TE) for maximizing coupling efficiency toincorporate the orthogonal polarization component E_(⊥) into the secondwaveguide 325 substantially in TE mode. A following phase matchingrelationship is fulfilled:

${{{\pm n_{f}}\sin\;\theta} + \frac{\lambda}{\Lambda_{{TM},{TE}}}} = n_{{eff}{({{TM},{TE}})}}$n_(f) is the effective refractive index of fiber mode (of the opticalfiber for guiding the incident light). θ is the angle of incident to thenormal of the plane of 2D grating. λ is the input wavelength. Λ_(TM) andΛ_(TE) are the grating period for TM and TE modes. n_(eff(TM,TE)) arethe effective refractive indices of TM and TE grating modes. Thenegative sign of sin θ is corresponding to the output where the angle offiber wave vector and the plane of grating is less than 90 degree. Inthe example, this will be for TE mode. In general, TE and TM mode outputdirections could be reversed.

In the embodiment, the design of focusing grating of the 2D grating 300in both directions helps to decrease a size of the 2D grating 300 aswell as a total size of the surface grating coupler 30. The focal lengthof each grating can be designed separately.

In the embodiment, the positive and negative sign of the sin θ result inthat the polarization light in TM mode coupled in one of two outputwaveguides (316 and 326) has a preferred entrance point to be at thefarther focal point of the corresponding set of concentric ellipticalcurves (310 or 320) and the polarization light in TE mode coupled inanother of the two output waveguides has a preferred entrance point atthe closest focal point of the corresponding set of concentricelliptical curves. This can be represented by the following formula:

$r_{{TM},{TE}} = \frac{m\;\lambda}{n_{{eff}{({{TM},{TE}})}} \pm {\sin\;\theta\;\cos\;{\varphi \cdot n_{f}}}}$r_(TM,TE) is radius of curvature of the corresponding set of concentricelliptical curves. m is an integer. φ is the angle of projection ofincident light wave vector on the plane of grating with respect to thebisector of the corresponding taper of the first or second waveguide(315 or 325).

In another aspect, the present disclosure provides a method forperforming wafer-level optical verification. The method includesproviding an array of photonics chip devices on a substrate. Inparticular, this method is associated with manufacturing integratedphotonics modules or components and can be applied for performingtesting for performance verification directly on wafer without dicing toobtain individual module or component at each die. Optionally, mostintegrated photonics modules or components are formed in a silicon layeron a silicon-on-insulator (SOI) substrate. The method further includesforming an array of surface grating couplers in the silicon layer on theSOI substrate. Each surface grating coupler optionally can be apolarization splitting grating coupler described in FIG. 1 above orpolarization diverse grating coupler described in FIG. 3 above or acombination of both. Optionally, the surface grating coupler includes anarray of scattering elements arranged in a portion of the SOI substrateat a plurality of intersections of a first set of concentric ellipticalcurves crossing with a second set of concentric elliptical curvesrotated proximately 90 or 180 degrees to form a two-dimensional (2D)grating. Further, the surface grating coupler includes a first waveguidecoupled from the first convex side of the 2D grating to a first outputport and a second waveguide coupled from the second convex side of the2D grating to a second output port, the second output port beingorientated proximately 90 or 180 degrees relative to the first outputport. Additionally, the method includes coupling the first output portand the second output port respectively to one or more of waveguideinput/output ports of at least one of the array of photonics chipdevices. Furthermore, the method includes providing an array of opticalfibers on top of the substrate with corresponding fiber output/inputports commonly aligned with an angle deviate from normal of thesubstrate for respectively providing or receiving polarized light ineither TE polarization mode or TM polarization mode. Moreover, themethod includes performing measurement of at least some of the array ofphotonics chip devices or some outputs of at least one of the array ofphotonics chip devices simultaneously.

FIG. 5 shows an example of implementing a polarization diverse gratingcoupler for testing polarization DeMux component. As shown, thepolarization diverse grating coupler is substantially the same as thesurface grating coupler 30 of FIG. 3 and is formed in a layer ofmaterial, e.g., silicon, on a substrate shared by the two polarizationDeMux components. A first output waveguide 316 of the surface gratingcoupler 30 guides a TM polarization light to an input port 351 of afirst polarization DeMux 350 which has two output ports: a Bar port 352and a Cross port 353. A second output waveguide 326 of the surfacegrating coupler 30 guides a TE polarization light to an input port 361of a second polarization DeMux 360 which has two output ports: a Barport 362 and a Cross port 363. Optionally, the two polarization DeMuxcomponents belong to an array of polarization DeMux devices formed on aSOI wafer and the polarization diverse grating coupler is one of arrayof surface grating couplers formed on the same wafer. The above testingscheme shown in FIG. 5 can be expanded to entire wafer and all inputlight signals can be provided by array of optical fibers with a singlealignment respectively disposed on top of the array of surface gratingcouplers thereof so that a wafer-level testing can be performedsimultaneously with single optical alignment.

FIG. 6 shows an example of using surface grating for performingverification testing of Mach-Zehnder modulator. In the example, theMach-Zehnder modulator 600 can be one of an array of photonics chipcomponents. Optionally, these photonics chip components are formed on aSOI substrate. Two surface grating couplers are added and formed on thesame SOI substrate to provide an extra optical IO to ease thewafer-level verification of the Mach-Zehnder modulator 600. A firstsurface grating coupler 20 is a single polarization grating couplerdisposed with its output waveguide connected to one input port of a 2×2splitter 610 as a testing input to provide light in single polarizationmode as a testing signal. Another input port of the 2×2 splitter 610 isfor regular input signal. Additionally, a second surface grating coupler20′ is substantially the same as the first surface grating coupler 20 asa single polarization grating coupler that can couple either TE or TMmode light. The second surface grating coupler 20′ has its outputwaveguide connected to one output port of a 2×2 combiner 620 as atesting output to receive testing signal in the single polarizationmode. Another output port of the 2×2 combiner 620 is connected to restof circuit. In this example, the surface grating coupler is either usedto provide optical input and/or collect optical output from the wafercomponents.

FIG. 7A shows a simplified diagram having an array of photonics chipcomponents 710 arranged in series: component 1, component 2, component3, component 4, and so on, on a same wafer level. At the same time, anarray of surface grating couplers 720 are provided on the same waferlevel to ease the wafer level testing and verification. In particular,the array of surface grating couplers 720 includes some of surfacegrating couplers 20 disposed thereof for providing optical inputs torespective photonics chip components and some of surface gratingcouplers 20′ disposed thereof for collecting optical outputs fromrespective photonics chip components.

FIG. 7B shows another simplified diagram having an array of photonicschip components 730 arranged in series: component 1, component 2,component 3, and so on, on a same wafer level. An array of surfacegrating couplers 740 are provided on the same wafer level to ease thewafer level testing and verification. In particular, the array ofsurface grating couplers 740 includes some of surface grating couplers20 disposed thereof for providing optical inputs to respective photonicschip components and some of surface grating couplers 20′ disposedthereof for collecting optical outputs from respective photonics chipcomponents. Further, for certain component, for example component 3, twosurface grating couplers 21 and 22 are coupled to provide two opticalinputs and two other surface grating couplers 21′ and 22′ are coupled tocollect two optical outputs.

In another example shown in FIG. 8, a polarization diverse gratingcoupler 30 is disposed to provide two optical inputs with one TMpolarization mode and one TE polarization mode respectively to twopolarization DeMux components 810 and 820 under testing while at thesame setting, several surface grating couplers (41, 42, 43, and 44) areprovided for collecting single polarization light from outputs of thetwo polarization DeMux components 810 and 820 under testing using afiber array to input and collect light. For example, an input port of afirst polarization DeMux component 810 receives a TM polarization lightfrom a first output waveguide 316 of the polarization diverse gratingcoupler 30 and an input of a second polarization DeMux component 820receives a TE polarization light from a second output waveguide 326 ofthe polarization diverse grating coupler 30. Each of the twopolarization DeMux components actually only handles single polarizationsignals. At the output side of each polarization DeMux component, twosurface grating couplers are disposed to collect single polarizationlight outputted respectively from a bar port and a cross port. Forexample, the surface grating couplers 41 and 42 are used to collect TMpolarization light outputted from the first polarization DeMux component810 and the surface grating couplers 43 and 44 are used to collect TEpolarization light outputted from the second polarization DeMuxcomponent 820.

In an alternative embodiment, the method of using surface gratingcouplers for performing wafer level testing is implemented using thesurface grating couplers for providing optical testing inputs combinedwith using monitor photodiodes (PDs) for collecting electrical currentsin response to the optical testing inputs. FIG. 9 shows a simplifiedlayout for performing wafer-level integrated circuit testing usinggrating couplers and monitor PDs according to some embodiments of thepresent disclosure. This diagram is merely an example, which should notunduly limit the scope of the claims. One of ordinary skill in the artwould recognize many variations, alternatives, and modifications. Asshown, a plurality of integrated silicon-photonics (SiPho) opticalmodules are manufactured on a single wafer 900 respectively distributedin a plurality of dies arranged in columns and rows. Each integratedSiPho optical module 901 in each die is shown in more details in anexpanded view, including at least several modulators, a Mux/combinercomponent, a DeMux/splitter component, and a functional opticalcomponent. Accordingly, the method of performing wafer-level testingincludes adding several surface grating couplers (11, . . . , 15)respectively to couple with the several modulators to provide extratesting inputs and adding several monitor PDs (21, . . . , 25)respectively at extra output ports of the several modulators to detectcorresponding testing current signals. Additionally, the method includesadd another surface grating coupler 16 to couple with the DeMux/splittercomponent to provide a testing input and a corresponding monitor PD 26to detect testing current signal. Further, the method includes adding asurface grating coupler 17 to couple with the Mux/combiner component toprovide a testing input and a monitor PD 27 to detect a current signalin association with the testing input. Moreover, the method includesadding a surface grating coupler 18 for supplying a testing input to thefunctional optical component which has a plurality of built-in PDs fordetecting multiple current signals in association with at least thetesting input. As integrating monitor PDs to wafer level integratedSiPho optical module is easier and cheaper than integrating light sourcethereon, the method provided above is advantageously to couple lightfrom fiber-based light source through grating couplers into eachcorresponding components of the integrated SiPho optical module, whichenables full-scale wafer-level testing on photonic integrated circuit.

FIG. 10A shows an example of using the grating coupler and PD forperforming wafer level testing, which involves a surface grating coupler19 configured to receive a light signal from a tunable laser source andmultiple PDs coupled to an optical hybrid module to detect variouscurrent signals. Optionally, the surface grating coupler 19 is a simplesurface grating coupler capable of coupling single polarization light ofeither TE or TM mode. The tunable laser source is able to sweep widerange of wavelengths to flexibly provide various light signals withdifferent peak wavelengths as testing inputs. Accordingly, for eachtesting input with a particular peak wavelength in a single polarizationmode is supplied, via a 1×2 splitter and an optical delay line basedphase modulator, to the optical hybrid module, at least one PD is ableto detect corresponding current signal associated with the testing inputso as to perform optical performance verification at the particular peakwavelength. As a different testing input is supplied with a differentpeak wavelength, a different PD may be able to detect the correspondingcurrent.

FIG. 10B shows another example of using the surface grating coupler andPD to perform wafer level testing of a multi-wavelength Mux/DeMuxdevice. Again, a surface grating coupler 19 simple surface gratingcoupler for providing single polarization grating. A tunable lasersource is used as a light source coupled through a fiber to provideincident light to the surface grating coupler 19 so that the incidentlight has a variable peak wavelength. After the incident light passingthrough the surface grating coupler 19 a single polarization light isgenerated and provided as an extra testing input to the wavelengthMux/DeMux device. Optionally, the variable peak wavelength covers allchannels associated with the wavelength Mux/DeMux device. Additionally,a plurality of photodiodes with different wavelength sensitive rangesdesigned in corresponding channels of the wavelength Mux/DeMux deviceare coupled to multiple output ports of the wavelength Mux/DeMux device.Therefore, the wavelength Mux/DeMux device can be conveniently testedfor every channel under a single testing input with a single alignment.

In yet another aspect, the present disclosure provides a wafer-leveltesting system. The system includes an array of devices under test(DUTs) formed in a substrate and an array of surface grating couplersformed in the same substrate. The array of surface grating couplersincludes at least a polarization splitting grating coupler containing anarray of scattering elements arranged in a portion of the substrate at aplurality of intersections of a first set of concentric ellipticalcurves crossing with a second set of concentric elliptical curvesrotated proximately 90 degrees as a two-dimensional (2D) grating withthe first waveguide and the second waveguide formed in the samesubstrate. The polarization splitting grating coupler is configured toreceive an incident light from atop of the substrate via an opticalfiber and to split the incident light to a first polarization light inTE mode to the first waveguide coupled to a first output port and asecond polarization light in TE mode to the second waveguide coupled toa second output port. The system further optionally includes apolarization diverse grating coupler containing an array of scatteringelements arranged in a portion of the substrate at a plurality ofintersections of a first set of concentric elliptical curves crossingwith a second set of concentric elliptical curves rotated proximately180 degrees as a two-dimensional (2D) grating with the first waveguideand the second waveguide formed in the substrate. The polarizationdiverse grating coupler is configured to receive an incident light fromatop of the substrate via an optical fiber and to diverse a firstpolarization light in TM mode to the first waveguide coupled to a firstoutput port and a second polarization light in TE mode to the secondwaveguide coupled to a second output port. Optionally, the polarizationdiverse grating coupler is used to provide polarization optical inputsin both TM or TE mode and the polarization splitting grating coupler isused either for providing optical inputs with single polarization ordetect optical outputs of the DUTs formed in the same substrate in awafer-level testing scheme.

While the above is a full description of the specific embodiments,various modifications, alternative constructions and equivalents may beused. Therefore, the above description and illustrations should not betaken as limiting the scope of the present invention which is defined bythe appended claims.

What is claimed is:
 1. A surface grating coupler for polarizationsplitting comprising: a planar layer; an array of scattering elementsarranged in a portion of the planar layer at a plurality ofintersections of a first set of concentric elliptical curves crossingwith a second set of concentric elliptical curves rotated proximately 90degrees to form a two-dimensional (2D) grating; a first extra gratingformed in the planar layer outside a first concave side of the 2Dgrating; a second extra grating formed in the planar layer outside asecond concave side of the 2D grating; a first waveguide formed in thesame planar layer connecting a first convex side of the 2D grating to afirst output port, the first convex side being opposite to the firstconcave side; and a second waveguide formed in the same planar layerconnecting a second convex side of the 2D grating to a second outputport, the second convex side being opposite to the second concave side.2. The surface grating coupler of claim 1, wherein the planar layercomprises silicon.
 3. The surface grating coupler of claim 2, whereineach scattering element is a hole of any shape into the planar layer. 4.The surface grating coupler of claim 2, wherein each scattering elementis a pillar of any shape above the planar layer.
 5. The surface gratingcoupler of claim 1, wherein each of the first/second set of theconcentric elliptical curves comprise a section of vertical or close tovertical ellipse having an equal spacing relative to an adjacentconcentric elliptical curve, the spacing being configured as a gratingperiod of the 2D grating.
 6. The surface grating coupler of claim 5,wherein the first extra grating comprises multiple trenches with a firstwidth and a first pitch in parallel to the first set of concentricelliptical curves, the second extra grating comprises multiple trencheswith a second width and a second pitch in parallel to the second set ofconcentric elliptical curves, wherein the first/second pitch issubstantially equal to the grating period of the first/second set ofconcentric elliptical curves.
 7. The surface grating coupler of claim 1,wherein the first waveguide comprises a first double-taper structurehaving a first taper section with a reducing first width from the firstconvex side to a first joint over a first length along a first nominaldirection and a second taper section with a reducing second width fromthe first joint to the first output port over a second length along asecond nominal direction, the second nominal direction being deviatedfrom the first nominal direction by a first angle and the first outputport being deviated from the second nominal direction by a second angle,wherein the first double-taper structure is optimized in terms ofachieving a minimum insertion loss of transmitting a first portion ofincident light to the first output port; the second waveguide comprisesa second double-taper structure having a third taper section with areducing third width from the second convex side to a second joint overa third length along a third nominal direction and a fourth tapersection with a reducing fourth width from the second joint to the secondoutput port over a fourth length along a fourth nominal direction, thefourth nominal direction being deviated from the third nominal directionby a third angle and the second output port being deviated from thefourth nominal direction by a fourth angle, wherein the seconddouble-taper structure is optimized in terms of achieving a minimuminsertion loss of transmitting a second portion of incident light to thesecond output port.
 8. The surface grating coupler of claim 7, whereinthe first output port is configured to be located substantially at afocal point of the first set of elliptical curves and the second outputport is configured to be located substantially at a focal point of thesecond set of elliptical curves.
 9. The surface grating coupler of claim7, wherein the first portion of incident light transmitted into thefirst output port is substantially a parallel polarization component ofthe incident light with an incident angle deviated slightly from 90degrees relative to the planar layer; the second portion of incidentlight transmitted into the second output port is substantially anorthogonal polarization component of the incident light with theincident angle deviated slightly from 90 degrees relative to the planarlayer.
 10. The surface grating coupler of claim 9, wherein each of theparallel polarization component and the orthogonal polarizationcomponent comprises a polarized light with a transverse magnetic (TM)polarization mode split from the incident light.
 11. The surface gratingcoupler of claim 9, wherein each of the parallel polarization componentand the orthogonal polarization component comprises a polarized lightwith a transverse magnetic (TE) polarization mode split from theincident light.
 12. The surface grating coupler of claim 9, wherein thesecond output port is in a direction having an angle offset from 90degrees relative to a direction of the first output port, wherein theangle is depended on the incident angle.
 13. A surface grating couplerfor polarization diverse comprising: a planar layer; an array ofscattering elements arranged in a portion of the planar layer at aplurality of intersections of a first set of concentric ellipticalcurves crossing with a second set of concentric elliptical curvesrotated proximately 180 degrees to form a two-dimensional (2D) grating;a first waveguide coupled from the first convex side of the 2D gratingto a first output port; a second waveguide coupled from the secondconvex side of the 2D grating to a second output port, the second outputport being orientated proximately 180 degrees relative to the firstoutput port; wherein each of the first waveguide and the secondwaveguide is characterized by a double-taper shape.
 14. The surfacegrating coupler of claim 13, wherein the planar layer comprises silicon.15. The surface grating coupler of claim 14, wherein each scatteringelement is a hole of any shape into the planar layer.
 16. The surfacegrating coupler of claim 14, wherein each scattering element is a pillarof any shape above the planar layer.
 17. The surface grating coupler ofclaim 13, wherein the first/second set of the concentric ellipticalcurves comprise multiple sections of vertical or close to verticalellipses having a first/second pitch configured as a first/secondgrating period of the 2D grating configured to receive an incident lightfrom an optical fiber above the planar layer.
 18. The surface gratingcoupler of claim 17, wherein each of the first waveguide and the secondwaveguide in double-taper shape comprises a first taper section with areducing first width from the first convex side to a first joint over afirst length along a first bisector of the first taper section and asecond taper section with a reducing second width from the first jointto the first output port over a second length along a second bisector ofthe second taper section, wherein the double-taper shape is optimized interms of achieving a minimum insertion loss of transmitting a parallelpolarization component and an orthogonal polarization component of theincident light with an incident angle deviated from 90 degrees relativeto the planar layer respectively to the first output port and the secondoutput port.
 19. The surface grating coupler of claim 18, wherein thedouble-taper shape of the first waveguide and the first grating periodare optimized in terms of achieving a minimum insertion loss oftransmitting a parallel polarization component of the incident lightwith an incident angle deviated slightly from 90 degrees relative to theplanar layer to the first output port.
 20. The surface grating couplerof claim 18, wherein the double-taper shape of the second waveguide andthe second grating period are optimized in terms of achieving a minimuminsertion loss of transmitting an orthogonal polarization component ofthe incident light with an incident angle deviated from 90 degreesrelative to the planar layer to the second output port.
 21. The surfacegrating coupler of claim 19, wherein the parallel polarization componentis configured to be outputted as a polarized light in transversemagnetic (TM) mode at the first output port located at a farther focalpoint of the first set of concentric elliptical curves.
 22. The surfacegrating coupler of claim 20, wherein the orthogonal polarizationcomponent is configured to be outputted as a polarized light intransverse electric (TE) mode at the second output port located at acloser focal point of the second set of concentric elliptical curves.23. A method for performing wafer-level optical verification comprising:providing an array of photonics chip devices on a substrate; forming anarray of surface grating couplers on the substrate, each surface gratingcoupler comprising: an array of scattering elements arranged in aportion of the substrate at a plurality of intersections of a first setof concentric elliptical curves crossing with a second set of concentricelliptical curves rotated proximately 90 or 180 degrees to form atwo-dimensional (2D) grating; a first waveguide coupled from the firstconvex side of the 2D grating to a first output port; a second waveguidecoupled from the second convex side of the 2D grating to a second outputport, the second output port being orientated proximately 90 or 180degrees relative to the first output port; coupling the first outputport and the second output port respectively to one or more of waveguideinput/output ports of at least one of the array of photonics chipdevices; providing an array of optical fibers on top of the substratewith corresponding fiber output/input ports commonly aligned with anangle deviate from 90 degrees relative to the substrate for respectivelyproviding or receiving polarized light in either TE polarization mode orTM polarization mode; and performing measurement of at least some of thearray of photonics chip devices or some outputs of at least one of thearray of photonics chip devices simultaneously.
 24. The method of claim23, wherein the array of photonics chip devices comprises at least afirst polarization DeMux and a second polarization DeMux, whereinforming the array of surface grating couplers comprises forming at leasta polarization diverse grating coupler having an array of scatteringelements arranged in a portion of the substrate at a plurality ofintersections of a first set of concentric elliptical curves crossingwith a second set of concentric elliptical curves rotated proximately180 degrees as a two-dimensional (2D) grating with the first waveguideand the second waveguide formed in the substrate, providing apolarization light in TM mode from the first output port to an input ofthe first polarization DeMux, and providing a polarization light in TEmode from the second output port to an input of the second polarizationDeMux.
 25. The method of claim 23, wherein forming the array of surfacegrating couplers further comprises forming at least two polarizationsplitting grating couplers each having an array of scattering elementsarranged in a portion of the substrate at a plurality of intersectionsof a first set of concentric elliptical curves crossing with a secondset of concentric elliptical curves rotated proximately 90 degrees toform a two-dimensional (2D) grating with the first waveguide and thesecond waveguide formed in the substrate, coupling the first outputports of the at least two polarization splitting grating couplers torespectively detect a bar-output polarization light in TM mode and across-output polarization light in TM mode from the first polarizationDeMux, and coupling the second output ports of the at least twopolarization splitting grating couplers to respectively detect abar-output polarization light in TE mode and a cross-output polarizationlight in TE mode from the second polarization DeMux.
 26. The method ofclaim 23, further comprising: adding a 2×2 beam splitter to an inputport of a first one of the array of photonics chip devices and a 2×2beam combiner to an output port thereof; coupling the first output portof a first one of the array of surface grating couplers to one of twoinput ports of the 2×2 beam splitter; coupling the first output port ofa second one of the array of surface grating couplers to one of twooutput ports of the 2×2 beam combiner; wherein the first one and thesecond one of the array of surface grating couplers are configured toprovide single polarization grating added as a second input/output forcharacterization and performance verification of the first one of thearray of photonics chip devices.
 27. The method of claim 23, whereineach of the array of photonics chip devices comprises an integratedphotonics module including multiple modulators, a polarization Mux, apolarization DeMux, and a functional optical component, the methodfurther comprising: integrating a monitor photodiode to each of themultiple modulators, the polarization Mux, the polarization De-Mux, andthe functional optical component of one integrated photonics module inthe array; coupling a single polarization light from one of the array ofoptical fibers through one of the array of surface grating couplers asan extra input to each of the multiple modulators, the polarization Mux,the polarization DeMux, and the functional optical component of the oneintegrated photonics module in the array; performing testing of eachintegrated photonics module in the array in the same substratesimultaneously.
 28. The method of claim 27, wherein integrating amonitor photodiode comprises integrating an array of monitor photodiodesrespectively sensitive to optical signals in multiple wavelengthwindows; coupling a single polarization light comprises using a tunablelaser to provide multiple optical signals with peak wavelengthsrespectively in the multiple wavelength windows via one of the array ofoptical fibers through one of array of surface grating couplers toperform multi-channel testing of each integrated photonics module in thearray in the same substrate under a wafer-level setup thereof.